| 11850703 |
Method of forming retaining ring with shaped surface |
Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Douglas R. McAllister, Jian Lin +12 more |
2023-12-26 |
$30,871,000 |
| 11648639 |
Polishing jig assembly for a new or refurbished electrostatic chuck |
William M. Lu, Wendell Glenn Boyd, Jr. |
2023-05-16 |
$64,199,000 |
| 11577361 |
Retaining ring with shaped surface and method of forming |
Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Douglas R. McAllister, Jian Lin +12 more |
2023-02-14 |
$35,617,000 |
| 11260498 |
Method of polishing a new or a refurbished electrostatic chuck |
William M. Lu, Wendell Glen Boyd, Jr. |
2022-03-01 |
$41,046,000 |
| 11260500 |
Retaining ring with shaped surface |
Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Douglas R. McAllister, Jian Lin +12 more |
2022-03-01 |
$41,046,000 |
| 10766117 |
Retaining ring with shaped surface |
Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Douglas R. McAllister, Jian Lin +12 more |
2020-09-08 |
$22,964,000 |
| 9937601 |
Retaining ring with Shaped Surface |
Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Douglas R. McAllister, Jian Lin +12 more |
2018-04-10 |
$134,735,000 |
| 9381613 |
Reinforcement ring for carrier head |
Jamie Stuart Leighton, Young J. Paik |
2016-07-05 |
$10,411,000 |
| 9272387 |
Carrier head with shims |
Young J. Paik, Christopher R. Mahon |
2016-03-01 |
$12,540,000 |
| 9227297 |
Retaining ring with attachable segments |
Irfanulla Khuddus Rahmathullah, Bopanna Ichettira Vansantha, Padma Gopalakrishnan, Abraham Palaty, Aswathnarayanaiah Ravi +3 more |
2016-01-05 |
$12,358,000 |
| 9186773 |
Retaining ring with shaped surface |
Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Douglas R. McAllister, Jian Lin +12 more |
2015-11-17 |
$15,900,000 |
| 9168631 |
Two-part retaining ring with interlock features |
Irfanulla Khuddus Rahmathullah, Bopanna Ichettira Vansantha, Padma Gopalakrishnan, Aswathnarayanaiah Ravi, Abraham Palaty +3 more |
2015-10-27 |
$16,675,000 |
| 8585468 |
Retaining ring with shaped surface |
Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Douglas R. McAllister, Jian Lin +12 more |
2013-11-19 |
$10,370,000 |
| 8066551 |
Retaining ring with shaped surface |
Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Douglas R. McAllister, Jian Lin +12 more |
2011-11-29 |
$8,648,000 |
| 8008941 |
Polishing head testing with movable pedestal |
Jeffrey P. Schmidt, Jay Rohde |
2011-08-30 |
$11,098,000 |
| 7927190 |
Retaining ring with shaped surface |
Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Douglas R. McAllister, Jian Lin +12 more |
2011-04-19 |
$9,957,000 |
| 7750657 |
Polishing head testing with movable pedestal |
Jeffrey P. Schmidt, Jay Rohde |
2010-07-06 |
$6,398,000 |
| 7530153 |
Attaching components of a carrier head |
Trung T. Doan, Jeffrey P. Schmidt, Douglas R. McAllister |
2009-05-12 |
$30,677,000 |
| 7344434 |
Retaining ring with shaped surface |
Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Douglas R. McAllister, Trung T. Doan +5 more |
2008-03-18 |
$36,315,000 |
