Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11810766 | Protection of aluminum process chamber components | Karthikeyan Balaraman, Sathyanarayana Bindiganavale, Rajasekhar PATIBANDLA, Balamurugan Ramasamy, Kartik Shah +3 more | 2023-11-07 |
| 11648639 | Polishing jig assembly for a new or refurbished electrostatic chuck | Wendell Glenn Boyd, Jr., Stacy Meyer | 2023-05-16 |
| 11260498 | Method of polishing a new or a refurbished electrostatic chuck | Wendell Glen Boyd, Jr., Stacy Meyer | 2022-03-01 |
| 11072852 | Pre-conditioned chamber components | Brian T. West, Lizhong Sun | 2021-07-27 |
| 10583465 | 30 nm in-line LPC testing and cleaning of semiconductor processing equipment | Jianqi Wang, Yixing Lin, Kevin A. PAPKE | 2020-03-10 |
| 9101954 | Geometries and patterns for surface texturing to increase deposition retention | Jianqi Wang, Yukari Nishimura, Joseph F. Sommers, Sio On Lo, Rajan Balesan | 2015-08-11 |
| 9001489 | Electrostatic chuck AlN dielectric repair | Wendell Glenn Boyd, Jr., Joseph F. Sommers, Rajan Balesan | 2015-04-07 |