Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12337415 | Method and apparatus for laser texturing a component | Yao-Hung YANG, Chih-Yang Chang, Shannon WANG | 2025-06-24 |
| 11602776 | Sonic cleaning system and method of sonic cleaning a workpiece | Michael J. Coughlin | 2023-03-14 |
| 11525889 | Non-contact method for detectiing and distinguishing human and animal based on IR-UWB bio-radar signal | Yang Zhang, Fulai Liang, Zhao-Ming Li, Hao Lv, Ziqi ZHANG +3 more | 2022-12-13 |
| 11435470 | Multi-target life detection method based on radar signal and detection radar | Yang Zhang, Fulai Liang, Hao Lv, Ziqi ZHANG, Zhao-Ming Li +1 more | 2022-09-06 |
| 11125512 | Coolant and a method to control the pH and resistivity of coolant used in a heat exchanger | Joung-Woo Lee, Gia Khanh Pham, Alex Gerrard, Robert C. McIntosh | 2021-09-21 |
| 10941303 | Chemical conversion of yttria into yttrium fluoride and yttrium oxyfluoride to develop pre-seasoned corossion resistive coating for plasma components | Mats Larsson, Yogita Pareek, Kevin A. PAPKE | 2021-03-09 |
| 10583465 | 30 nm in-line LPC testing and cleaning of semiconductor processing equipment | William M. Lu, Yixing Lin, Kevin A. PAPKE | 2020-03-10 |
| 10037883 | Enhanced productivity for an etch system through polymer management | Robert Chebi, Alfredo Granados, Zhao H. Ceng, Rajan Balesan | 2018-07-31 |
| 9442189 | Multichannel UWB-based radar life detector and positioning method thereof | Xijing Jing, Yang Zhang, Hao Lu, Yanfeng Li, Zhao-Ming Li +2 more | 2016-09-13 |
| 9101954 | Geometries and patterns for surface texturing to increase deposition retention | William M. Lu, Yukari Nishimura, Joseph F. Sommers, Sio On Lo, Rajan Balesan | 2015-08-11 |
| 8097089 | Methods for cleaning process kits and chambers, and for ruthenium recovery | Samantha Tan | 2012-01-17 |