Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10037883 | Enhanced productivity for an etch system through polymer management | Robert Chebi, Alfredo Granados, Zhao H. Ceng, Jianqi Wang | 2018-07-31 |
| 9101954 | Geometries and patterns for surface texturing to increase deposition retention | Jianqi Wang, William M. Lu, Yukari Nishimura, Joseph F. Sommers, Sio On Lo | 2015-08-11 |
| 9001489 | Electrostatic chuck AlN dielectric repair | Wendell Glenn Boyd, Jr., Joseph F. Sommers, William M. Lu | 2015-04-07 |