Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12417921 | Methods and apparatus for in-situ protection of etched surfaces | Shiva Rai | 2025-09-16 |
| 12165877 | Methods for etching a material layer for semiconductor applications | Zhigang Wang, Jiao Yang, Heng Wang, Jon C. Farr, Ruizhe Ren | 2024-12-10 |
| 11915940 | Method of depositing a pre-etch protective layer | Zhi-Gang Wang, Jiao Yang, Jon C. Farr, Heng Wang, Rui Ren | 2024-02-27 |
| 10037883 | Enhanced productivity for an etch system through polymer management | Robert Chebi, Zhao H. Ceng, Jianqi Wang, Rajan Balesan | 2018-07-31 |
| 9318341 | Methods for etching a substrate | Robert Chebi, Alan Cheshire, Gabriel Roupillard | 2016-04-19 |