Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9318341 | Methods for etching a substrate | Robert Chebi, Gabriel Roupillard, Alfredo Granados | 2016-04-19 |
| 8937017 | Method and apparatus for etching | Stanley Detmar | 2015-01-20 |
| 8298959 | Method and apparatus for etching | — | 2012-10-30 |