Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9318363 | Substrate processing system and substrate position correction method | Kozo Kai, Keiji Osada, Chunmui Li | 2016-04-19 |
| 9223305 | Semiconductor manufacturing system | Gaku Ikeda, Koichi Miyashita, Satoshi Gomi, Chunmui Li, Kunio Takano | 2015-12-29 |
| 6999830 | Method and device for processing semiconductor wafer | Shinji Arai, Masahiro Mochizuki | 2006-02-14 |