Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10269605 | Processing system and processing program | — | 2019-04-23 |
| 9810905 | Support information display method, maintenance support method of substrate processing apparatus, support information display control apparatus, substrate processing system and recording medium | Toshiaki Kodama, Toru Yamauchi, Sensho Kobayashi, Hiroshi Nakamura, Kazuya Uoyama | 2017-11-07 |
| 9223305 | Semiconductor manufacturing system | Koichi Miyashita, Takamasa Chikuma, Satoshi Gomi, Chunmui Li, Kunio Takano | 2015-12-29 |
| 7672502 | Substrate positioning device, substrate positioning method and program | Keiji Osada, Yasuhiko Nishinakayama, Hiroyuki Takahashi | 2010-03-02 |
| 7630785 | Substrate processing system for setting uniform module cycle length and access control time lag in two pipeline processing systems | — | 2009-12-08 |