Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9810905 | Support information display method, maintenance support method of substrate processing apparatus, support information display control apparatus, substrate processing system and recording medium | Toshiaki Kodama, Sensho Kobayashi, Hiroshi Nakamura, Gaku Ikeda, Kazuya Uoyama | 2017-11-07 |
| 9620402 | Alignment apparatus and substrate processing apparatus | Toshiaki Kodama | 2017-04-11 |
| 7898798 | Heat dissipating structure for electronic component and display device | Tatsuya Sakata, Kenichi Seki, Terutaka Yana | 2011-03-01 |
| 7800895 | Electronic apparatus and sound insulating method thereof | Akira Inoue, Sumio Otsuka, Norio Kobayashi | 2010-09-21 |
| 6754554 | Semiconductor manufacturing apparatus detecting state of connection between controllers | Kiminori Okada, Tadahito Nezu | 2004-06-22 |