Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10229847 | Substrate transfer chamber and container connecting mechanism with lid opening mechanisms | Shinji Wakabayashi, Keisuke Kondoh | 2019-03-12 |
| 9810905 | Support information display method, maintenance support method of substrate processing apparatus, support information display control apparatus, substrate processing system and recording medium | Toshiaki Kodama, Toru Yamauchi, Hiroshi Nakamura, Gaku Ikeda, Kazuya Uoyama | 2017-11-07 |
| 9443749 | Vacuum processing apparatus | Shinji Wakabayashi | 2016-09-13 |
| 9230842 | Substrate processing apparatus | — | 2016-01-05 |
| 9228685 | Load lock device | Keita Kumagai | 2016-01-05 |
| 9147591 | Substrate processing apparatus | — | 2015-09-29 |
| 5788747 | Exhaust system for film forming apparatus | Takashi Horiuchi, Masahide Itoh, Hisashi Gomi | 1998-08-04 |