Issued Patents All Time
Showing 1–25 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11688619 | Vacuum processing apparatus and substrate transfer method | — | 2023-06-27 |
| 11404299 | Substrate transfer mechanism, substrate processing apparatus, and substrate processing method | — | 2022-08-02 |
| 11335586 | Transfer device | Takehiro Shindo | 2022-05-17 |
| 10906756 | Substrate processing device | Keisuke Kondoh | 2021-02-02 |
| 10431481 | Load lock apparatus and substrate processing system | — | 2019-10-01 |
| 10429543 | Substrate detection apparatus, substrate detection method and substrate processing system | Toshiaki Kodama | 2019-10-01 |
| 10403529 | Carrier transport device and carrier transport method | Keisuke Kondoh | 2019-09-03 |
| 10229847 | Substrate transfer chamber and container connecting mechanism with lid opening mechanisms | Keisuke Kondoh, Sensho Kobayashi | 2019-03-12 |
| 9962840 | Substrate conveyance apparatus | — | 2018-05-08 |
| 9929030 | Substrate processing device and substrate transfer method | — | 2018-03-27 |
| 9887115 | Substrate processing apparatus, cover opening and closing mechanism,shielding mechanism, and method for purging container | — | 2018-02-06 |
| 9732881 | Gate valve and substrate processing system | Keisuke Kondoh, Norihiko Tsuji | 2017-08-15 |
| 9443749 | Vacuum processing apparatus | Sensho Kobayashi | 2016-09-13 |
| 9389607 | Method for setting substrate-treatment time, and storage medium | — | 2016-07-12 |
| 9330950 | Substrate processing apparatus | — | 2016-05-03 |
| 9269599 | Substrate relay apparatus, substrate relay method, and substrate processing apparatus | — | 2016-02-23 |
| 9096395 | Electric actuator | — | 2015-08-04 |
| 8999103 | Substrate processing system, substrate processing method and storage medium | — | 2015-04-07 |
| 8472778 | Video player and video playback control method | Masaru Kimura | 2013-06-25 |
| 8230728 | Alcohol concentration sensor disposed in fuel tank of automotive vehicle | Hiroshi Nakamura, Akikazu Uchida, Yukinobu Kajita | 2012-07-31 |
| 8214150 | In-vehicle apparatus for performing route guidance or content playback in cooperation with a portable terminal | Shigeru Kohno | 2012-07-03 |
| 8123456 | Container changing system and container changing method | — | 2012-02-28 |
| 8025475 | Wafer transfer apparatus, wafer transfer method and storage medium | — | 2011-09-27 |
| 8021513 | Substrate carrying apparatus and substrate carrying method | — | 2011-09-20 |
| 7720988 | Method and apparatus for multimedia reproduction | Manabu Kusano, Masatoshi Ejiri | 2010-05-18 |