Issued Patents All Time
Showing 1–25 of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12394645 | Substrate processing system and method of teaching transfer device | Tomoyuki Oshima | 2025-08-19 |
| 12362215 | Apparatus for transferring substrate and method for transferring substrate | Dongwei Li, Lingxin JIANG, Shinya Okano, Toshiaki Kodama, Wataru Matsumoto | 2025-07-15 |
| 12330888 | Substrate transfer device and method of cooling arm | Wataru Matsumoto | 2025-06-17 |
| 12322642 | Substrate transfer device and substrate transfer method | — | 2025-06-03 |
| 12224193 | Control method and substrate transfer system | — | 2025-02-11 |
| 12211719 | Method of controlling substrate transfer system and the substrate transfer system | Wataru Matsumoto | 2025-01-28 |
| 12183619 | Method of delivering substrate, and substrate delivery system | — | 2024-12-31 |
| 12094746 | Semiconductor manufacturing apparatus and method of controlling rotation of stage | Ryotaro Takahashi | 2024-09-17 |
| 12009240 | Apparatus for transporting substrate, system for processing substrate, and method of transporting substrate | Toshiaki Kodama | 2024-06-11 |
| 11984340 | Teaching method | — | 2024-05-14 |
| 11961758 | Apparatus for processing substrate and method of transferring substrate | — | 2024-04-16 |
| 11948822 | Substrate transfer device and substrate processing system | Dongwei Li | 2024-04-02 |
| 11850743 | Transport apparatus, semiconductor manufacturing apparatus, and transport method | Toshiaki Kodama | 2023-12-26 |
| 11776831 | Substrate transport system and substrate transport method | — | 2023-10-03 |
| 11491639 | Extendable device | — | 2022-11-08 |
| 11335586 | Transfer device | Shinji Wakabayashi | 2022-05-17 |
| 11075106 | Transfer device | Hiroshi Koizumi | 2021-07-27 |
| 10971385 | Substrate processing apparatus and transfer position correcting method | Hiroki Oka, Hiroshi Narushima, Sho Otsuki | 2021-04-06 |
| 10763139 | Vacuum transfer module and substrate processing apparatus | — | 2020-09-01 |
| 10748796 | Substrate processing apparatus | — | 2020-08-18 |
| 10586729 | Transfer device and control method thereof | Hiroshi Koizumi | 2020-03-10 |
| 10133266 | Conveyance robot replacement apparatus and conveyance robot replacement method | Masahiro DOGOME, Hiroshi IKARI, Toshiaki TOYOMAKI, Genichi Nanasaki | 2018-11-20 |
| 9805960 | Substrate conveyance method | Tadashi Shioneri, Masahiro DOGOME | 2017-10-31 |
| 9589822 | Substrate transfer method with a second positioning step | — | 2017-03-07 |
| 9082798 | Substrate collecting method | — | 2015-07-14 |