Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12191188 | Transfer device, transfer system, and end effector | Norihiko Amikura, Masatomo KITA, Masahiro DOGOME, Takami FUKASAWA, Daisuke Hayashi | 2025-01-07 |
| 12131937 | Transfer system, transfer device, and transfer method | Norihiko Amikura, Masatomo KITA | 2024-10-29 |
| 12030179 | Teaching method of transfer device and processing system | — | 2024-07-09 |
| 11923232 | Positioning apparatus, processing system, and positioning method | — | 2024-03-05 |
| 11735448 | Container, container partition plate, substrate processing system, and substrate transfer method | Seiichi Kaise, Masahiro Numakura, Yuki TAKEYAMA | 2023-08-22 |
| 11721564 | Substrate processing system and substrate transfer apparatus and method | — | 2023-08-08 |
| 11705355 | Substrate transfer system and atmospheric transfer module | Norihiko Amikura | 2023-07-18 |
| 11631607 | Carrier and jig | Seiichi Kaise | 2023-04-18 |
| 11227785 | Substrate transfer system and atmospheric transfer module | Norihiko Amikura | 2022-01-18 |
| 10133266 | Conveyance robot replacement apparatus and conveyance robot replacement method | Masahiro DOGOME, Hiroshi IKARI, Genichi Nanasaki, Takehiro Shindo | 2018-11-20 |
| 9760023 | Substrate carrying device | — | 2017-09-12 |