Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11735448 | Container, container partition plate, substrate processing system, and substrate transfer method | Toshiaki TOYOMAKI, Seiichi Kaise, Yuki TAKEYAMA | 2023-08-22 |
| 9824861 | Substrate processing apparatus, substrate processing method and recording medium recording substrate processing program | Yoshikazu Ishikawa, Toshihiko Hamada, Junya Sato, Toshiyuki Kobayashi, Shouichi Otake | 2017-11-21 |
| 9305814 | Method of inspecting substrate processing apparatus and storage medium storing inspection program for executing the method | — | 2016-04-05 |
| 8731698 | Substrate receiving method and controller | Shinobu Onodera | 2014-05-20 |
| 8571703 | System, method and storage medium for controlling a processing system | Keiji Osada | 2013-10-29 |
| 8452455 | Control device and control method of plasma processing system, and storage medium storing control program | Hiroaki Mochizuki | 2013-05-28 |
| 8382910 | Cleaning method for substrate processing system, storage medium, and substrate processing system | Hiroaki Mochizuki, Kiyohito Iijima | 2013-02-26 |
| 8145339 | Substrate processing apparatus and substrate transfer method adopted therein | Kiyohito Iijima, Hiroaki Mochizuki | 2012-03-27 |
| 8055378 | Device for controlling processing system, method for controlling processing system and computer-readable storage medium stored processing program | — | 2011-11-08 |
| 7738987 | Device and method for controlling substrate processing apparatus | — | 2010-06-15 |
| 7640072 | Substrate processing apparatus, control method for the apparatus, and program for implementing the method | Noriaki Shimizu | 2009-12-29 |
| 7455747 | Substrate processing apparatus, control method for the apparatus, and program for implementing the method | Noriaki Shimizu | 2008-11-25 |
| 7367769 | Semiconductor production system, cluster tool, control method of semiconductor production system and maintenance method of cluster tool | Tomoyuki Ishii | 2008-05-06 |