Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10859426 | Method of inspecting flow rate measuring system | Jun Hirose, Norihiko Amikura, Risako Miyoshi | 2020-12-08 |
| 9305817 | Method for purging a substrate container | Seiichi Kaise, Shigeki Amemiya, Hiroki Fujita, Masaru Nishino, Atsushi Rikukawa | 2016-04-05 |
| 8731698 | Substrate receiving method and controller | Masahiro Numakura | 2014-05-20 |