Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11231313 | Method of obtaining output flow rate of flow rate controller and method of processing workpiece | Norihiko Amikura | 2022-01-25 |
| 10876870 | Method of determining flow rate of a gas in a substrate processing system | Norihiko Amikura, Kazuyuki Miura, Masaaki Nagase, Satoru Yamashita, Yohei Sawada +2 more | 2020-12-29 |
| 10871786 | Substrate processing system and method of determining flow rate of gas | Norihiko Amikura, Kazuyuki Miura, Hiroshi Yazaki, Yasuhiro SHOJI | 2020-12-22 |
| 10859426 | Method of inspecting flow rate measuring system | Jun Hirose, Norihiko Amikura, Shinobu Onodera | 2020-12-08 |
| 10845119 | Method of arranging treatment process | Jun Hirose, Norihiko Amikura | 2020-11-24 |
| 10788356 | Method of inspecting gas supply system, method of calibrating flow controller, and method of calibrating secondary reference device | Norihiko Amikura | 2020-09-29 |
| 10692744 | Method of inspecting gas supply system | — | 2020-06-23 |
| 10692743 | Method of inspecting gas supply system | — | 2020-06-23 |
| 10424466 | Method for inspecting shower plate of plasma processing apparatus | Norihiko Amikura | 2019-09-24 |
| 10274972 | Method of inspecting gas supply system | Norihiko Amikura | 2019-04-30 |
| 10168049 | Method for preventing explosion of exhaust gas in decompression processing apparatus | Norihiko Amikura, Norikazu Sasaki | 2019-01-01 |
| 10031007 | Method of calculating output flow rate of flow rate controller | Norihiko Amikura | 2018-07-24 |
| 9240307 | Plasma processing apparatus | Norihiko Amikura | 2016-01-19 |
| 9236230 | Plasma processing apparatus and gas supply method therefor | Yoshiyuki Kato, Norihiko Amikura, Kimihiro Fukasawa | 2016-01-12 |
| 8597401 | Exhausting method and gas processing apparatus | Norihiko Amikura | 2013-12-03 |