Issued Patents All Time
Showing 1–25 of 47 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12341046 | Transfer apparatus and transfer method | Masatomo KITA | 2025-06-24 |
| 12285786 | Substrate processing apparatus, purge gas control method, and vacuum transfer chamber cleaning method | Hideyuki OSADA, Genichi Nanasaki, Seiichi Kaise, Masatomo KITA, Takashi Takizawa +1 more | 2025-04-29 |
| 12264947 | Measuring system, measuring device, and measuring method | Takayuki Hatanaka, Kimihiro YOKOYAMA | 2025-04-01 |
| 12191188 | Transfer device, transfer system, and end effector | Masatomo KITA, Masahiro DOGOME, Takami FUKASAWA, Daisuke Hayashi, Toshiaki TOYOMAKI | 2025-01-07 |
| 12165893 | Substrate processing system and transfer method | Masatomo KITA, Toshiyuki MAKABE, Shin Matsuura, Nobutaka SASAKI, Gyeong min PARK | 2024-12-10 |
| 12131937 | Transfer system, transfer device, and transfer method | Toshiaki TOYOMAKI, Masatomo KITA | 2024-10-29 |
| 12125738 | Storage module, substrate processing system, and method of transferring consumable member | Masatomo KITA | 2024-10-22 |
| 12046454 | Performance calculation method and processing apparatus | Atsushi Sawachi | 2024-07-23 |
| 12040202 | Processing system | Jun Hirose | 2024-07-16 |
| 11994234 | Gate valve and driving method | Masatomo KITA | 2024-05-28 |
| 11955356 | Processing system and transfer method | Masatomo KITA | 2024-04-09 |
| 11862506 | Substrate processing system, vacuum substrate transfer module, and substrate transfer method | Masatomo KITA | 2024-01-02 |
| 11791180 | Substrate transfer system and load lock module | Masahiro DOGOME, Masatomo KITA | 2023-10-17 |
| 11742188 | Substrate processing method, pressure control apparatus and substrate processing system | Kazuyuki Miura | 2023-08-29 |
| 11705355 | Substrate transfer system and atmospheric transfer module | Toshiaki TOYOMAKI | 2023-07-18 |
| 11698648 | Gas supply system and gas supply method | Atsushi Sawachi | 2023-07-11 |
| 11644121 | Gas inspection method, substrate processing method, and substrate processing system | Risako Matsuda | 2023-05-09 |
| 11585717 | Method for calibrating plurality of chamber pressure sensors and substrate processing system | Risako Matsuda, Kazuyuki Miura, Keita Shouji | 2023-02-21 |
| 11538665 | Gas supply system, substrate processing apparatus, and control method for gas supply system | Atsushi Sawachi | 2022-12-27 |
| 11513541 | Method of inspecting and inspection apparatus | Atsushi Sawachi | 2022-11-29 |
| 11326914 | Flow rate measurement apparatus and method for more accurately measuring gas flow to a substrate processing system | Risako Matsuda, Kazuyuki Miura | 2022-05-10 |
| 11231313 | Method of obtaining output flow rate of flow rate controller and method of processing workpiece | Risako Miyoshi | 2022-01-25 |
| 11227785 | Substrate transfer system and atmospheric transfer module | Toshiaki TOYOMAKI | 2022-01-18 |
| 10996688 | Gas supply system and gas supply method | Atsushi Sawachi | 2021-05-04 |
| 10876870 | Method of determining flow rate of a gas in a substrate processing system | Risako Miyoshi, Kazuyuki Miura, Masaaki Nagase, Satoru Yamashita, Yohei Sawada +2 more | 2020-12-29 |