Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11899476 | Method and apparatus for measuring gas flow | Risako Matsuda, Shinichiro Hayasaka, Manabu Oie | 2024-02-13 |
| 11742228 | Substrate processing method and substrate processing system | Risako Matsuda, Shinobu KINOSHITA, Manabu Oie | 2023-08-29 |
| 11585717 | Method for calibrating plurality of chamber pressure sensors and substrate processing system | Risako Matsuda, Norihiko Amikura, Kazuyuki Miura | 2023-02-21 |
| 11555755 | Method of calibrating multiple chamber pressure sensors | Risako Matsuda | 2023-01-17 |