Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11742188 | Substrate processing method, pressure control apparatus and substrate processing system | Norihiko Amikura | 2023-08-29 |
| 11585717 | Method for calibrating plurality of chamber pressure sensors and substrate processing system | Risako Matsuda, Norihiko Amikura, Keita Shouji | 2023-02-21 |
| 11326914 | Flow rate measurement apparatus and method for more accurately measuring gas flow to a substrate processing system | Norihiko Amikura, Risako Matsuda | 2022-05-10 |
| 10876870 | Method of determining flow rate of a gas in a substrate processing system | Risako Miyoshi, Norihiko Amikura, Masaaki Nagase, Satoru Yamashita, Yohei Sawada +2 more | 2020-12-29 |
| 10871786 | Substrate processing system and method of determining flow rate of gas | Risako Miyoshi, Norihiko Amikura, Hiroshi Yazaki, Yasuhiro SHOJI | 2020-12-22 |
| 10801521 | Heating device and turbo molecular pump | Tsutomu Mochizuki, Kazuhiro Chiba, Ryo Murakami | 2020-10-13 |
| 9921089 | Flow rate range variable type flow rate control apparatus | Tadahiro Ohmi, Masahito Saito, Shoichi Hino, Tsuyoshi Shimazu, Kouji Nishino +10 more | 2018-03-20 |
| 9793102 | Semiconductor manufacturing apparatus and semiconductor manufacturing method | Kensuke Takahashi | 2017-10-17 |
| 9734993 | Semiconductor manufacturing apparatus | Atsushi Kobayashi, Akira Yasumuro | 2017-08-15 |
| 9383758 | Flow rate range variable type flow rate control apparatus | Tadahiro Ohmi, Masahito Saito, Shoichi Hino, Tsuyoshi Shimazu, Kouji Nishino +10 more | 2016-07-05 |
| 9010369 | Flow rate range variable type flow rate control apparatus | Tadahiro Ohmi, Masahito Saito, Shoichi Hino, Tsuyoshi Shimazu, Kouji Nishino +10 more | 2015-04-21 |
| 8906980 | Water-soluble polymer composition, composition for forming plaster layer of skin patch, and skin patch | — | 2014-12-09 |
| 8418714 | Flow rate range variable type flow rate control apparatus | Tadahiro Ohmi, Masahito Saito, Shoichi Hino, Tsuyoshi Shimazu, Kouji Nishino +10 more | 2013-04-16 |
| 7353841 | Relative pressure control system and relative flow control system | Tetsujiro Kono, Hiroki Doi, Minoru Ito, Hideki Nagaoka, Keiki Ito +5 more | 2008-04-08 |
| 6979722 | Process for production of alkyllene oxide polymers | Shigeki Hamamoto, Nobutaka Fujimoto, Makoto Katou | 2005-12-27 |
| 6785745 | Recording/reproducing device | Atsushi Isshiki | 2004-08-31 |
| 6719856 | Titaniums having excellent impact resistance and manufacturing methods | Kazuhiro Takahashi, Motomi Masaki, Tatsuo Ohya | 2004-04-13 |
| 5694325 | Semiconductor production system | Etsuo Fukuda, Masayoshi Tazawa, Tomiko Takano, Yuichi Satoguchi, Yuichiro Ozaki | 1997-12-02 |
| 4930798 | Bicycle handle assembly | Toshimasa Yamazaki, Kazuto Yamasaki | 1990-06-05 |
| 4901595 | Auxiliary brake control assembly for bicycle | Nobuo Ozaki, Toshimasa Yamazaki | 1990-02-20 |