Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11899476 | Method and apparatus for measuring gas flow | Shinichiro Hayasaka, Manabu Oie, Keita Shouji | 2024-02-13 |
| 11742228 | Substrate processing method and substrate processing system | Shinobu KINOSHITA, Manabu Oie, Keita Shouji | 2023-08-29 |
| 11644121 | Gas inspection method, substrate processing method, and substrate processing system | Norihiko Amikura | 2023-05-09 |
| 11585717 | Method for calibrating plurality of chamber pressure sensors and substrate processing system | Norihiko Amikura, Kazuyuki Miura, Keita Shouji | 2023-02-21 |
| 11555755 | Method of calibrating multiple chamber pressure sensors | Keita Shouji | 2023-01-17 |
| 11326914 | Flow rate measurement apparatus and method for more accurately measuring gas flow to a substrate processing system | Norihiko Amikura, Kazuyuki Miura | 2022-05-10 |
| 11292035 | Method for cleaning gas supply line and processing system | — | 2022-04-05 |