Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11899476 | Method and apparatus for measuring gas flow | Risako Matsuda, Manabu Oie, Keita Shouji | 2024-02-13 |
| 10316835 | Method of determining output flow rate of gas output by flow rate controller of substrate processing apparatus | Jun Yamashima, Toshihiro TSURUTA, Hiroshi Fujii, Junichi Akiba, Naoya Jami +1 more | 2019-06-11 |
| 9732909 | Gas supply method | Ken Horiuchi, Fumiko Yokouchi, Takeshi Yokouchi | 2017-08-15 |
| 8859046 | Substrate processing apparatus, control method adopted in substrate processing apparatus and program | Hiroshi Nakamura, Toshiyuki Kobayashi, Seiichi Kaise | 2014-10-14 |
| 8790529 | Gas supply system, substrate processing apparatus and gas supply method | Ken Horiuchi, Fumiko Yagi, Takeshi Yokouchi | 2014-07-29 |
| 7896967 | Gas supply system, substrate processing apparatus and gas supply method | Ken Horiuchi, Fumiko Yagi, Takeshi Yokouchi | 2011-03-01 |