Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9732909 | Gas supply method | Shinichiro Hayasaka, Ken Horiuchi, Fumiko Yokouchi | 2017-08-15 |
| 8790529 | Gas supply system, substrate processing apparatus and gas supply method | Shinichiro Hayasaka, Ken Horiuchi, Fumiko Yagi | 2014-07-29 |
| 8475623 | Substrate processing method, system and program | Seiichi Kaise, Noriyuki Iwabuchi, Shigeaki Kato, Hiroshi Nakamura, Mariko Shibata +1 more | 2013-07-02 |
| 8257601 | Substrate processing method, system and program | Seiichi Kaise, Noriyuki Iwabuchi, Shigeaki Kato, Hiroshi Nakamura, Mariko Shibata +1 more | 2012-09-04 |
| 8190281 | Substrate processing apparatus, method for examining substrate processing conditions, and storage medium | Fumiko Yagi | 2012-05-29 |
| 7896967 | Gas supply system, substrate processing apparatus and gas supply method | Shinichiro Hayasaka, Ken Horiuchi, Fumiko Yagi | 2011-03-01 |
| 7553773 | Pressure control method and processing device | Eiji Hirose, Noriyuki Iwabuchi, Shingo Suzuki | 2009-06-30 |
| 7535688 | Method for electrically discharging substrate, substrate processing apparatus and program | Fumiko Yagi | 2009-05-19 |
| 6908864 | Pressure control method and processing device | Eiji Hirose, Noriyuki Iwabuchi, Shingo Suzuki | 2005-06-21 |