Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10460949 | Substrate processing apparatus, substrate processing method and storage medium | Hiroyuki Takahashi, Kazunori Kazama, Satoshi TODA, Tetsuro Takahashi | 2019-10-29 |
| 8475623 | Substrate processing method, system and program | Seiichi Kaise, Shigeaki Kato, Hiroshi Nakamura, Takeshi Yokouchi, Mariko Shibata +1 more | 2013-07-02 |
| 8257601 | Substrate processing method, system and program | Seiichi Kaise, Shigeaki Kato, Hiroshi Nakamura, Takeshi Yokouchi, Mariko Shibata +1 more | 2012-09-04 |
| 8124539 | Plasma processing apparatus, focus ring, and susceptor | Shosuke Endoh, Shigeaki Kato, Tomoya Okubo, Jun Hirose, Koichi Nagakura +2 more | 2012-02-28 |
| 7553773 | Pressure control method and processing device | Eiji Hirose, Takeshi Yokouchi, Shingo Suzuki | 2009-06-30 |
| 6908864 | Pressure control method and processing device | Eiji Hirose, Takeshi Yokouchi, Shingo Suzuki | 2005-06-21 |