Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12387955 | Substrate processing apparatus and substrate processing method | Wataru Nakagomi, Tatsuya Mukoyama, Shigeru Kubota, Sho Ichinose, Junya Chizuwa +2 more | 2025-08-12 |
| 10460949 | Substrate processing apparatus, substrate processing method and storage medium | Hiroyuki Takahashi, Noriyuki Iwabuchi, Satoshi TODA, Tetsuro Takahashi | 2019-10-29 |
| 10254774 | Temperature control method, control apparatus, and plasma processing apparatus | Tatsuya Miura, Wataru Ozawa, Kimihiro Fukasawa | 2019-04-09 |
| 8172949 | Substrate processing apparatus, program for performing operation and control method thereof, and computer readable storage medium storing the program | Tomoyuki Kudo, Jun Ozawa, Hiroshi Nakamura, Tsuyoshi Moriya, Hiroyuki Nakayama +1 more | 2012-05-08 |
| 7756599 | Substrate processing apparatus, program for performing operation and control method thereof, and computer readable storage medium storing the program | Tomoyuki Kudo, Jun Ozawa, Hiroshi Nakamura, Tsuyoshi Moriya, Hiroyuki Nakayama +1 more | 2010-07-13 |