Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10254774 | Temperature control method, control apparatus, and plasma processing apparatus | Tatsuya Miura, Wataru Ozawa, Kazunori Kazama | 2019-04-09 |
| 9299540 | Plasma processing apparatus, plasma processing method, and storage medium | Tatsuya Ogi, Wataru Ozawa, Kazuhiro Kanaya | 2016-03-29 |
| 9236230 | Plasma processing apparatus and gas supply method therefor | Yoshiyuki Kato, Norihiko Amikura, Risako Miyoshi | 2016-01-12 |
| 8864934 | Plasma processing apparatus, plasma processing method, and storage medium | Tatsuya Ogi, Wataru Ozawa, Kazuhiro Kanaya | 2014-10-21 |
| 7409253 | System and method for processing a substrate and program therefor | Noriaki Shimizu, Kazuhiro Kanaya, Jun Shoji | 2008-08-05 |