Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9299540 | Plasma processing apparatus, plasma processing method, and storage medium | Tatsuya Ogi, Wataru Ozawa, Kimihiro Fukasawa | 2016-03-29 |
| 8864934 | Plasma processing apparatus, plasma processing method, and storage medium | Tatsuya Ogi, Wataru Ozawa, Kimihiro Fukasawa | 2014-10-21 |
| 7409253 | System and method for processing a substrate and program therefor | Noriaki Shimizu, Kimihiro Fukasawa, Jun Shoji | 2008-08-05 |