Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10418289 | Anomaly detection method and semiconductor manufacturing apparatus | Hiroaki Mochizuki | 2019-09-17 |
| 9299540 | Plasma processing apparatus, plasma processing method, and storage medium | Wataru Ozawa, Kimihiro Fukasawa, Kazuhiro Kanaya | 2016-03-29 |
| 9002494 | Substrate transfer method and storage medium | Eiki Endo | 2015-04-07 |
| 8864934 | Plasma processing apparatus, plasma processing method, and storage medium | Wataru Ozawa, Kimihiro Fukasawa, Kazuhiro Kanaya | 2014-10-21 |
| 8663489 | Substrate replacing method and substrate processing apparatus | Shigeru Ishizawa, Hiroshi Koizumi | 2014-03-04 |
| 8423176 | Substrate processing apparatus and substrate transfer method adopted in substrate processing apparatus | — | 2013-04-16 |
| 8140181 | Substrate transfer method, control program, and storage medium storing same | — | 2012-03-20 |
| 8078311 | Substrate processing apparatus and substrate transfer method adopted in substrate processing apparatus | — | 2011-12-13 |
| 6711454 | System and method for scheduling the movement of wafers in a wafer-processing tool | Kentaro Joma | 2004-03-23 |
| 6535784 | System and method for scheduling the movement of wafers in a wafer-processing tool | Kentaro Joma | 2003-03-18 |
| 6162010 | Method for recovering object to be treated after interruption | Shigeru Ishizawa, Hiroaki Mochizuki | 2000-12-19 |