Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12094696 | Focus ring replacement method and plasma processing system | — | 2024-09-17 |
| 11990323 | Focus ring replacement method and plasma processing system | — | 2024-05-21 |
| 11069548 | Substrate processing method and substrate processing system | Toru Nishino, Kiyohito Iijima | 2021-07-20 |
| 10490392 | Focus ring replacement method and plasma processing system | — | 2019-11-26 |
| 10468278 | Substrate transfer method and substrate processing apparatus | — | 2019-11-05 |
| 10403525 | Substrate processing method and substrate processing system | Toru Nishino, Kiyohito Iijima | 2019-09-03 |
| 8663489 | Substrate replacing method and substrate processing apparatus | Hiroshi Koizumi, Tatsuya Ogi | 2014-03-04 |
| 7837425 | Transportation apparatus and drive mechanism | Hiroaki Saeki, Takehiro Shindo, Tsutomu Hiroki, Wataru Machiyama | 2010-11-23 |
| 7780391 | Substrate processing device | Takaaki Matsuoka, Katsuhiko Iwabuchi, Tsutomu Hiroki | 2010-08-24 |
| 7622006 | Processed body carrying device, and processing system with carrying device | Hiroaki Saeki | 2009-11-24 |
| 7532940 | Transfer mechanism and semiconductor processing system | — | 2009-05-12 |
| 7371683 | Method for carrying object to be processed | Eiji Horike | 2008-05-13 |
| 7286890 | Transfer apparatus for target object | Wataru Machiyama, Hiroshi Koizumi, Tsutomu Hiroki, Keisuke Kondoh | 2007-10-23 |
| 6983195 | Semiconductor processing system and method of transferring workpiece | Kiyohito Iijima | 2006-01-03 |
| 6510365 | Carrier system positioning method | Yasuhiko Nishinakayama, Hiroaki Saeki, Takashi Kawano, Tetsu Osawa | 2003-01-21 |
| 6466835 | Deadlock avoidance method and treatment system for object to be treated | Hiroaki Saeki | 2002-10-15 |
| 6328864 | Vacuum processing apparatus | Yoshiaki Sasaki, Keisuke Kondoh, Tetsuo Yoshida | 2001-12-11 |
| 6162010 | Method for recovering object to be treated after interruption | Tatsuya Ogi, Hiroaki Mochizuki | 2000-12-19 |
| 6144926 | Method of sensing access positions of arm | Keiichi Matsushima | 2000-11-07 |
| 5754780 | Apparatus and method for performing serial communication between master and slave devices | Teruo Asakawa, Akiyoshi Shoujima | 1998-05-19 |