Issued Patents All Time
Showing 1–25 of 42 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12261060 | Substrate processing apparatus and stage cleaning method | — | 2025-03-25 |
| 11437259 | Stage, stage manufacturing method, and heat exchanger | — | 2022-09-06 |
| 11139185 | Substrate processing device and substrate transfer method | — | 2021-10-05 |
| 11004664 | Heat transfer medium supply system and substrate processing apparatus | — | 2021-05-11 |
| 10763764 | Stage and substrate processing apparatus | — | 2020-09-01 |
| 10658160 | Stage and substrate processing apparatus | — | 2020-05-19 |
| 10502508 | System including temperature-controllable stage, semiconductor manufacturing equipment and stage temperature control method | — | 2019-12-10 |
| 10475686 | Stage, stage manufacturing method, and heat exchanger | — | 2019-11-12 |
| 10312062 | Temperature control system and temperature control method | — | 2019-06-04 |
| 9995378 | Drive device and substrate processing system | Toshinao Kato | 2018-06-12 |
| 9947564 | Conveyance base and conveyance system | Takehiro Nakayama | 2018-04-17 |
| 9520309 | Substrate processing apparatus and substrate processing method | — | 2016-12-13 |
| 9406539 | Substrate transfer apparatus | — | 2016-08-02 |
| 9312153 | Substrate processing system, transfer module, substrate processing method, and method for manufacturing semiconductor element | — | 2016-04-12 |
| 9227320 | Transfer device and transfer method | Hisayoshi Ito | 2016-01-05 |
| 9230840 | Substrate transfer device for substrate processing system | — | 2016-01-05 |
| 9209055 | Substrate processing apparatus | — | 2015-12-08 |
| 9165810 | Conveyance device and substrate processing system | Ikuo Sawada, Kazuyoshi Matsuzaki, Yoshiki Fukuhara | 2015-10-20 |
| 9138901 | Transfer device, substrate processing system and posture control unit | Toshinao Kato | 2015-09-22 |
| 8821644 | Bevel/backside polymer removing method and device, substrate processing apparatus and storage medium | Isamu Sakuragi, Akinori Kitamura, Takehiro Shindo | 2014-09-02 |
| D704753 | Substrate conveyer for a substrate processing device | — | 2014-05-13 |
| 8590861 | Gate valve and substrate processing apparatus equipped with the same | Masaaki Nose, Masanao Matsushita, Takehiro Nishiba | 2013-11-26 |
| 8562275 | Transfer device and semiconductor processing system | — | 2013-10-22 |
| 8380337 | Vacuum processing apparatus and vacuum transfer apparatus | — | 2013-02-19 |
| 8057153 | Substrate transfer device, substrate processing apparatus and substrate transfer method | — | 2011-11-15 |