Issued Patents All Time
Showing 1–25 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10672622 | Etching method and etching apparatus | Yusuke Shimizu, Masahiko Takahashi | 2020-06-02 |
| 10121674 | Method for etching silicon layer and plasma processing apparatus | Eiji Suzuki | 2018-11-06 |
| 9779954 | Method for etching silicon layer and plasma processing apparatus | Eiji Suzuki | 2017-10-03 |
| 9711371 | Method of etching organic film | Kosuke Kariu, Toshihisa Ozu, Hai Woo Lee | 2017-07-18 |
| 9570312 | Plasma etching method | Ryohei TAKEDA, Mitsuhiro Tomura, Shinji Higashitsutsumi, Hiroto Ohtake, Takashi Tsukamoto | 2017-02-14 |
| 9502537 | Method of selectively removing a region formed of silicon oxide and plasma processing apparatus | Hiroto Ohtake, Eiji Suzuki | 2016-11-22 |
| 9412607 | Plasma etching method | Tomiko Kamada, Hiroto Ohtake, Yutaka Osada, Yuji Otsuka, Masayuki Kohno +2 more | 2016-08-09 |
| 9289651 | Golf ball resin composition and golf ball | Kazuyoshi Shiga, Takahiro Shigemitsu, Yu Kawabata | 2016-03-22 |
| 9209034 | Plasma etching method and plasma etching apparatus | Kenta Yasuda, Shunsuke Ishida | 2015-12-08 |
| 9181399 | Method for producing polysiloxane | Kinuko Ogura | 2015-11-10 |
| 9136486 | Composition for organic semiconductor insulating films, and organic semiconductor insulating film | Hiroshi Suzuki, Takashi Hamada | 2015-09-15 |
| 9087798 | Etching method | Hiroto Ohtake, Hironori Matsuoka, Yoko Noto | 2015-07-21 |
| 8952117 | Process for producing solvent-soluble reactive polysiloxanes | Naomasa Furuta, Hiroshi Suzuki | 2015-02-10 |
| 8940852 | Method for manufacturing reactive polysiloxane solution | Naomasa Furuta | 2015-01-27 |
| 8829142 | Curable composition and process for production of organosilicon compound | Sayaka Ooike, Hiroshi Suzuki | 2014-09-09 |
| 8821644 | Bevel/backside polymer removing method and device, substrate processing apparatus and storage medium | Isamu Sakuragi, Tsutomu Hiroki, Takehiro Shindo | 2014-09-02 |
| 8329774 | Organosilicon compounds which have oxetanyl groups, and a method for the production and curable compositions of the same | Sayaka Ooike, Hiroshi Suzuki | 2012-12-11 |
| 8168739 | Polysiloxane, method for producing the same, and method for producing cured product of the same | Hiroshi Suzuki | 2012-05-01 |
| 8110613 | Process for producing silicon compound having oxetanyl group | Sayaka Oike, Hiroshi Suzuki | 2012-02-07 |
| 7883631 | Plasma etching method, plasma etching apparatus, control program and computer-readable storage medium | Masanobu Honda, Nozomi Hirai | 2011-02-08 |
| 7842190 | Plasma etching method | — | 2010-11-30 |
| 7838626 | Polycarbosilane and method for producing same | Toshihisa Shimano, Akio Arano, Hiroshi Suzuki | 2010-11-23 |
| 7794616 | Etching gas, etching method and etching gas evaluation method | Masanobu Honda, Kazuya Nagaseki | 2010-09-14 |
| 7655572 | Semiconductor device manufacturing method, semiconductor device manufacturing apparatus, control program and computer storage medium | Masanobu Honda, Nozomi Hirai, Masahiro Nakamura, Tatsuya Sugimoto | 2010-02-02 |
| 7473377 | Plasma processing method | Tomoyo Yamaguchi, Takashi Fuse, Kiwamu Fujimoto, Masanobu Honda, Kazuya Nagaseki +3 more | 2009-01-06 |