Issued Patents All Time
Showing 1–25 of 70 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424424 | Plasma monitoring system, plasma monitoring method, and monitoring device | Satoru TERUUCHI, Jun Hirose, Shinji Himori | 2025-09-23 |
| 12322578 | Exhaust device, processing apparatus, and exhausting method | Kazuki Moyama, Toshiya Matsuda, Naokazu Furuya, Tatsuro Ohshita | 2025-06-03 |
| 12288676 | Stage and substrate processing apparatus | Takayuki Ishii, Michishige Saito | 2025-04-29 |
| 12255049 | Plasma processing apparatus and plasma processing method | Koichi Nagami, Shinji Himori | 2025-03-18 |
| 12186898 | Part transporting device and processing system | Kazuki Moyama, Toshiya Matsuda | 2025-01-07 |
| 12154793 | Etching apparatus and etching method | Koichi Nagami | 2024-11-26 |
| 12087591 | Plasma processing apparatus and system | Gen TAMAMUSHI | 2024-09-10 |
| 12033832 | Plasma processing method and plasma processing apparatus | Shinji Kubota, Shinji Himori, Koichi Nagami | 2024-07-09 |
| 11981993 | Forming method of component and substrate processing system | Michishige Saito, Shota Kaneko | 2024-05-14 |
| 11967487 | Forming method of component and plasma processing apparatus | Michishige Saito, Shota Kaneko | 2024-04-23 |
| 11919032 | Film forming apparatus and method for manufacturing part having film containing silicon | Takayuki Ishii, Michishige Saito | 2024-03-05 |
| 11699573 | Plasma processing method | Kazuki Moyama | 2023-07-11 |
| 11613432 | Processing system and method using transporting device facilitating replacement of consumable part | Kazuki Moyama, Toshiya Matsuda | 2023-03-28 |
| 11450515 | Plasma processing apparatus | Shinji Himori, Mitsunori Ohata | 2022-09-20 |
| 11443924 | Upper electrode and plasma processing apparatus | Gen TAMAMUSHI, Chishio Koshimizu | 2022-09-13 |
| 11393662 | Apparatuses and methods for plasma processing | Zhiying Chen, Joel Blakeney, Megan Carruth, Peter Ventzek, Alok Ranjan | 2022-07-19 |
| 11387077 | Plasma processing method and plasma processing apparatus | Shinji Kubota, Shinji Himori, Koichi Nagami | 2022-07-12 |
| 11315793 | Etching method and plasma processing apparatus | Gen TAMAMUSHI | 2022-04-26 |
| 11315770 | Exhaust device for processing apparatus provided with multiple blades | Kazuki Moyama, Toshiya Matsuda, Naokazu Furuya, Tatsuro Ohshita | 2022-04-26 |
| 11227786 | Method of manufacturing electrostatic chuck and electrostsatic chuck | Satoshi Taga, Yoshiyuki Kobayashi | 2022-01-18 |
| 11170979 | Plasma etching method and plasma etching apparatus | Koichi Nagami, Kazunobu Fujiwara, Tatsuro Ohshita, Takashi Dokan, Koji Maruyama +1 more | 2021-11-09 |
| 11152194 | Plasma processing apparatuses having a dielectric injector | Zhiying Chen, Joel Blakeney, Peter Ventzek, Alok Ranjan | 2021-10-19 |
| 11107663 | Plasma processing system and plasma processing method | Kazuki Moyama | 2021-08-31 |
| 11043389 | Substrate processing method | Kazuki Moyama | 2021-06-22 |
| 10886135 | Substrate processing method and substrate processing apparatus | Shinji Kubota, Akihiro Yokota, Gen TAMAMUSHI | 2021-01-05 |