Issued Patents All Time
Showing 1–25 of 53 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424424 | Plasma monitoring system, plasma monitoring method, and monitoring device | Satoru TERUUCHI, Jun Hirose, Kazuya Nagaseki | 2025-09-23 |
| 12255049 | Plasma processing apparatus and plasma processing method | Koichi Nagami, Kazuya Nagaseki | 2025-03-18 |
| 12033832 | Plasma processing method and plasma processing apparatus | Shinji Kubota, Kazuya Nagaseki, Koichi Nagami | 2024-07-09 |
| 11764034 | Plasma processing method and plasma processing apparatus | Chishio Koshimizu, Shin Hirotsu, Takenobu Ikeda, Koichi Nagami | 2023-09-19 |
| 11450515 | Plasma processing apparatus | Kazuya Nagaseki, Mitsunori Ohata | 2022-09-20 |
| 11387077 | Plasma processing method and plasma processing apparatus | Shinji Kubota, Kazuya Nagaseki, Koichi Nagami | 2022-07-12 |
| 11170979 | Plasma etching method and plasma etching apparatus | Koichi Nagami, Kazunobu Fujiwara, Tatsuro Ohshita, Takashi Dokan, Koji Maruyama +1 more | 2021-11-09 |
| 11133157 | Plasma processing apparatus | Akihiro Yokota, Tatsuro Ohshita, Shu Kusano | 2021-09-28 |
| 10943766 | Power feed member and substrate processing apparatus | Shunichi Ito, Etsuji Ito, Naokazu Furuya, Gen TAMAMUSHI | 2021-03-09 |
| 10825663 | Plasma processing apparatus | Kazuya Nagaseki, Mitsunori Ohata | 2020-11-03 |
| 10699935 | Semiconductor manufacturing device and processing method | Yoshiyuki Kobayashi, Takehiro Kato, Etsuji Ito | 2020-06-30 |
| 10651012 | Substrate processing method | Akihiro Yokota, Etsuji Ito | 2020-05-12 |
| 10553407 | Plasma processing method and plasma processing apparatus | Koichi Nagami, Kazunobu Fujiwara, Tatsuro Ohshita, Takashi Dokan, Koji Maruyama +1 more | 2020-02-04 |
| 10388544 | Substrate processing apparatus and substrate processing method | Akio Ui, Hisataka Hayashi, Takeshi Kaminatsui, Norikazu Yamada, Takeshi Ohse +1 more | 2019-08-20 |
| 10297428 | Plasma processing apparatus | Akihiro Yokota, Tatsuro Ohshita, Shu Kusano | 2019-05-21 |
| 10290468 | Electrode for plasma processing apparatus, plasma processing apparatus, plasma processing method and storage medium | Masanobu Honda | 2019-05-14 |
| 10147633 | Transfer apparatus and plasma processing system | Takehiro Kato, Etsuji Ito | 2018-12-04 |
| 10032611 | Connection control method | Norikazu Yamada, Takeshi Ohse | 2018-07-24 |
| 9978566 | Plasma etching method | Akihiro Yokota, Tatsuro Ohshita, Shu Kusano, Etsuji Ito, Kazuya Nagaseki | 2018-05-22 |
| 9859146 | Semiconductor manufacturing device and processing method | Yoshiyuki Kobayashi, Takehiro Kato, Etsuji Ito | 2018-01-02 |
| 9564287 | Substrate processing apparatus and substrate processing method using same | Takeshi Ohse, Jun Abe, Norikazu Yamada | 2017-02-07 |
| 9412562 | Capacitive coupling plasma processing apparatus | Tatsuo Matsudo | 2016-08-09 |
| 9390943 | Substrate processing apparatus | Kazuya Nagaseki, Etsuji Ito, Akihiro Yokota, Shoichiro Matsuyama | 2016-07-12 |
| 9275836 | Plasma processing apparatus and plasma processing method | — | 2016-03-01 |
| 9245776 | Plasma processing apparatus | Daisuke Hayashi, Akitaka Shimizu | 2016-01-26 |