Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10943766 | Power feed member and substrate processing apparatus | Shunichi Ito, Shinji Himori, Naokazu Furuya, Gen TAMAMUSHI | 2021-03-09 |
| 10763087 | Plasma processing apparatus | Shuichi Takahashi, Takaharu MIYADATE, Norinao TAKASU, Akihiro Yokota, Naohiko Okunishi | 2020-09-01 |
| 10699935 | Semiconductor manufacturing device and processing method | Shinji Himori, Yoshiyuki Kobayashi, Takehiro Kato | 2020-06-30 |
| 10651012 | Substrate processing method | Akihiro Yokota, Shinji Himori | 2020-05-12 |
| 10147633 | Transfer apparatus and plasma processing system | Shinji Himori, Takehiro Kato | 2018-12-04 |
| 9978566 | Plasma etching method | Akihiro Yokota, Shinji Himori, Tatsuro Ohshita, Shu Kusano, Kazuya Nagaseki | 2018-05-22 |
| 9859146 | Semiconductor manufacturing device and processing method | Shinji Himori, Yoshiyuki Kobayashi, Takehiro Kato | 2018-01-02 |
| 9390943 | Substrate processing apparatus | Kazuya Nagaseki, Akihiro Yokota, Shinji Himori, Shoichiro Matsuyama | 2016-07-12 |
| 8895454 | Etching method of multilayer film | Shinji Himori, Akihiro Yokota, Shu Kusano, Hiroaki Ishizuka, Kazuya Nagaseki | 2014-11-25 |
| 7368876 | Plasma processing apparatus | Toshihiro Hayami, Itsuko Sakai | 2008-05-06 |