Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12261028 | Plasma processing apparatus | Shuichi Takahashi, Takaaki Kikuchi, Atsushi Ogata, Nobutaka SASAKI, Takashi Taira | 2025-03-25 |
| 11404249 | Substrate processing apparatus | Shuichi Takahashi, Takanori BANSE, Joji TAKAYOSHI, Rumiko MORIYA | 2022-08-02 |
| 11264267 | Apparatus for processing substrate and method for detecting a presence of a focus ring on a stage | Takashi Taira, Kenji Nagai, Hideaki Nagasaki | 2022-03-01 |
| 10763087 | Plasma processing apparatus | Shuichi Takahashi, Norinao TAKASU, Etsuji Ito, Akihiro Yokota, Naohiko Okunishi | 2020-09-01 |