Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12300467 | Plasma processing method and plasma processing apparatus | Manabu Oie, Toru Hisamatsu | 2025-05-13 |
| 11721522 | Plasma processing method and plasma processing apparatus | Kosuke Ogasawara, Kentaro Yamaguchi | 2023-08-08 |
| 11404249 | Substrate processing apparatus | Shuichi Takahashi, Takaharu MIYADATE, Joji TAKAYOSHI, Rumiko MORIYA | 2022-08-02 |
| 11367590 | Plasma processing method and plasma processing apparatus | Kosuke Ogasawara, Kentaro Yamaguchi | 2022-06-21 |
| 11145490 | Plasma processing method | Akihiro Yokota, Joji TAKAYOSHI, Shinya Morikita, Naohiko Okunishi | 2021-10-12 |
| 10825662 | Method for driving member and processing apparatus | Rumiko MORIYA, Suguru Sato, Yuuji AKIDUKI, Takehiro Tanikawa | 2020-11-03 |
| 10770268 | Plasma processing method and plasma processing apparatus | Shinya Morikita, Takahisa Iwasaki, Ryosuke Niitsuma, Hiroki Taoka | 2020-09-08 |
| 10707088 | Method of processing target object | Shinya Morikita, Yuta Seya, Ryosuke Niitsuma | 2020-07-07 |
| 10692726 | Method for processing workpiece | Shinya Morikita, Yuta Seya, Ryosuke Niitsuma | 2020-06-23 |
| 10546723 | Plasma processing method | Akihiro Yokota, Joji TAKAYOSHI, Shinya Morikita, Naohiko Okunishi | 2020-01-28 |
| 9818582 | Plasma processing method | Hiraku MURAKAMI, Nobutaka SASAKI, Shigeru Senzaki, Hiroshi Tsujimoto, Keigo Toyoda | 2017-11-14 |