Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10770268 | Plasma processing method and plasma processing apparatus | Shinya Morikita, Takanori BANSE, Takahisa Iwasaki, Hiroki Taoka | 2020-09-08 |
| 10707088 | Method of processing target object | Shinya Morikita, Takanori BANSE, Yuta Seya | 2020-07-07 |
| 10692726 | Method for processing workpiece | Shinya Morikita, Takanori BANSE, Yuta Seya | 2020-06-23 |
| D877079 | Electrode plate for plasma processing apparatus | Shinichi Kozuka, Manabu Ishikawa | 2020-03-03 |
| 10192750 | Plasma processing method | Shinya Morikita, Weichien Chen | 2019-01-29 |
| 9922841 | Plasma processing method | Haruto Kanamori | 2018-03-20 |
| D793572 | Electrode plate for plasma processing apparatus | Shinichi Kozuka, Manabu Ishikawa | 2017-08-01 |
| 9653317 | Plasma processing method and plasma processing apparatus | Masaru Nishino, Takao FUNAKUBO, Shinichi Kozuka, Tsutomu Ito | 2017-05-16 |