Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400865 | Pulsed capacitively coupled plasma processes | Peter Ventzek, Alok Ranjan, Kensuke Taniguchi | 2025-08-26 |
| 12347645 | Substrate processing method and substrate processing apparatus | Akira Hidaka, Shu Kino | 2025-07-01 |
| 11728176 | Treatment method | Kiyohito Ito, Kensuke Taniguchi, Michiko Nakaya, Masanobu Honda | 2023-08-15 |
| 11594398 | Apparatus and method for plasma processing | Yusuke Aoki, Fumiya TAKATA, Toshikatsu TOBANA, Kazunobu Fujiwara, Jun Abe +1 more | 2023-02-28 |
| 11569094 | Etching method and plasma processing apparatus | Kota ISHIHARADA, Fumiya TAKATA, Toshikatsu TOBANA | 2023-01-31 |
| 11545364 | Pulsed capacitively coupled plasma processes | Peter Ventzek, Alok Ranjan, Kensuke Taniguchi | 2023-01-03 |
| 11251048 | Plasma processing method and plasma processing apparatus | Yusuke Aoki, Toshikatsu TOBANA, Fumiya TAKATA, Kazunobu Fujiwara, Jun Abe +1 more | 2022-02-15 |
| 11145490 | Plasma processing method | Akihiro Yokota, Takanori BANSE, Joji TAKAYOSHI, Naohiko Okunishi | 2021-10-12 |
| 11081351 | Method of processing substrate, device manufacturing method, and plasma processing apparatus | Yusuke Aoki, Toshikatsu TOBANA, Satoru Nakamura | 2021-08-03 |
| 11062882 | Plasma processing apparatus and plasma processing method | Yusuke Aoki, Toshikatsu TOBANA, Fumiya TAKATA | 2021-07-13 |
| 10991551 | Cleaning method and plasma processing apparatus | Mohd Fairuz BIN BUDIMAN, Toshifumi Nagaiwa | 2021-04-27 |
| 10957515 | Plasma processing method and plasma processing apparatus | Masanori Hosoya, Soichiro Kimura | 2021-03-23 |
| 10950458 | Etching method | Yasutaka HAMA, Kiyohito Ito | 2021-03-16 |
| 10886138 | Substrate processing method and substrate processing apparatus | Timothy Tianshyun Yang, Kiyohito Ito, Michiko Nakaya, Masanobu Honda | 2021-01-05 |
| 10770268 | Plasma processing method and plasma processing apparatus | Takanori BANSE, Takahisa Iwasaki, Ryosuke Niitsuma, Hiroki Taoka | 2020-09-08 |
| 10707088 | Method of processing target object | Takanori BANSE, Yuta Seya, Ryosuke Niitsuma | 2020-07-07 |
| 10692726 | Method for processing workpiece | Takanori BANSE, Yuta Seya, Ryosuke Niitsuma | 2020-06-23 |
| 10546723 | Plasma processing method | Akihiro Yokota, Takanori BANSE, Joji TAKAYOSHI, Naohiko Okunishi | 2020-01-28 |
| 10192750 | Plasma processing method | Ryosuke Niitsuma, Weichien Chen | 2019-01-29 |
| 9412618 | Pattern forming method | Eiichi Nishimura, Fumiko Yamashita | 2016-08-09 |
| 7488689 | Plasma etching method | Masaharu Sugiyama, Atsushi Kawabata | 2009-02-10 |
| 7387743 | Etching method and apparatus, computer program and computer readable storage medium | Atsushi Kawabata | 2008-06-17 |