Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11594398 | Apparatus and method for plasma processing | Yusuke Aoki, Fumiya TAKATA, Shinya Morikita, Kazunobu Fujiwara, Jun Abe +1 more | 2023-02-28 |
| 11569094 | Etching method and plasma processing apparatus | Kota ISHIHARADA, Fumiya TAKATA, Shinya Morikita | 2023-01-31 |
| 11251048 | Plasma processing method and plasma processing apparatus | Yusuke Aoki, Fumiya TAKATA, Shinya Morikita, Kazunobu Fujiwara, Jun Abe +1 more | 2022-02-15 |
| 11081351 | Method of processing substrate, device manufacturing method, and plasma processing apparatus | Yusuke Aoki, Shinya Morikita, Satoru Nakamura | 2021-08-03 |
| 11062882 | Plasma processing apparatus and plasma processing method | Yusuke Aoki, Shinya Morikita, Fumiya TAKATA | 2021-07-13 |
| 10867778 | Cleaning method and processing apparatus | Hiroshi Tsujimoto | 2020-12-15 |
| 10069443 | Dechuck control method and plasma processing apparatus | Shigeru Senzaki, Shunichi Mikami | 2018-09-04 |
| 9911621 | Method for processing target object | Gen You, Soichiro Okada | 2018-03-06 |