Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10290510 | Plasma etching method, pattern forming method and cleaning method | — | 2019-05-14 |
| 10283368 | Plasma etching method and plasma etching apparatus | — | 2019-05-07 |
| 10069443 | Dechuck control method and plasma processing apparatus | Shigeru Senzaki, Toshikatsu TOBANA | 2018-09-04 |
| 9653321 | Plasma processing method | — | 2017-05-16 |
| 9147556 | Plasma processing method and plasma processing apparatus | — | 2015-09-29 |