Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10276405 | Plasma processing apparatus | Akinori Miyata, Hirofumi Haga, Nobutaka Nakao | 2019-04-30 |
| 10199246 | Temperature control mechanism, temperature control method and substrate processing apparatus | Katsuyuki Koizumi, Tomoyuki Takahashi, Dai KITAGAWA | 2019-02-05 |
| 10069443 | Dechuck control method and plasma processing apparatus | Shunichi Mikami, Toshikatsu TOBANA | 2018-09-04 |
| 9818582 | Plasma processing method | Hiraku MURAKAMI, Nobutaka SASAKI, Takanori BANSE, Hiroshi Tsujimoto, Keigo Toyoda | 2017-11-14 |
| 9613837 | Substrate processing apparatus and maintenance method thereof | Michishige Saito, Daiki Satoh, Ken Horiuchi, Koji Ando, Shingo KOIWA | 2017-04-04 |
| 7481903 | Processing device and method of maintaining the device, mechanism and method for assembling processing device parts, and lock mechanism and method for locking the lock mechanism | Toshiki Sasaki, Tadashi Aoto, Nobuyuki Nagayama, Kouji Mitsuhashi | 2009-01-27 |
| 6899786 | Processing device and method of maintaining the device, mechanism and method for assembling processing device part, and lock mechanism and method for locking the lock mechanism | Toshiki Sasaki, Tadashi Aoto, Nobuyuki Nagayama, Kouji Mitsuhashi | 2005-05-31 |