Issued Patents All Time
Showing 1–25 of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12276037 | Anodized titanium material and method for producing the same | Takehiko Muranaka, Kouji Niimi, Yuuta Ueno, Hikaru KIKUCHI, Hideto Saito | 2025-04-15 |
| 11548827 | Member for plasma processing apparatus and plasma processing apparatus with the same | Takashi Ikeda, Hajime Ishii, Kenji Fujimoto, Naoyuki Satoh, Koichi Murakami +1 more | 2023-01-10 |
| 11434174 | Member for plasma processing apparatus, plasma processing apparatus with the same and method for using sintered body | Takashi Ikeda, Hajime Ishii, Kenji Fujimoto, Naoyuki Satoh, Koichi Murakami +1 more | 2022-09-06 |
| 10766822 | Thermal spray material and thermal spray coated article | Hiroyuki Ibe, Takaya Masuda | 2020-09-08 |
| 10768089 | Particle collecting apparatus and particle collecting system | Toshihiko Kikuchi, Hikaru KIKUCHI, Katsushi Abe | 2020-09-08 |
| 10622196 | Plasma processing apparatus | Naoyuki Satoh | 2020-04-14 |
| 10566175 | Focus ring and plasma processing apparatus | Naoyuki Satoh, Masahiko Oka, Yasuyuki Matsuoka | 2020-02-18 |
| 10227263 | Thermal spray material and thermal spray coated article | Hiroyuki Ibe, Takaya Masuda | 2019-03-12 |
| 10138167 | Thermal spray material, thermal spray coating and thermal spray coated article | Hiroyuki Ibe, Kazuyuki Tsuzuki | 2018-11-27 |
| 10106466 | Thermal spray material, thermal spray coating and thermal spray coated article | Hiroyuki Ibe, Kazuyuki Tsuzuki | 2018-10-23 |
| 10106879 | Thermal spray material, thermal spray coating and thermal spray coated article | Hiroyuki Ibe, Kazuyuki Tsuzuki | 2018-10-23 |
| 10056223 | Plasma processing apparatus and temperature control method | — | 2018-08-21 |
| 9818583 | Electrode plate for plasma etching and plasma etching apparatus | Naoyuki Satoh, Keiichi Nagakubo | 2017-11-14 |
| 9117635 | Electrode plate for plasma etching and plasma etching apparatus | Naoyuki Satoh, Keiichi Nagakubo | 2015-08-25 |
| 8950469 | Temperature control system and temperature control method for substrate mounting table | Yasuharu Sasaki, Ryo Nonaka | 2015-02-10 |
| 8945313 | Vacuum exhaust method and a substrate processing apparatus therefor | Hidefumi Matsui, Tsuyoshi Moriya | 2015-02-03 |
| 8896210 | Plasma processing apparatus and method | Masaru Nishino, Masatsugu Makabe, Tatsuya Handa, Ryotaro Midorikawa, Keigo Kobayashi +1 more | 2014-11-25 |
| 8877002 | Internal member of a plasma processing vessel | Kouji Mitsuhashi, Hiroyuki Nakayama, Tsuyoshi Moriya, Hiroshi Nagaike | 2014-11-04 |
| 8739732 | Plasma treatment container internal member, and plasma treatment apparatus having the plasma treatment container internal member | Hiroyuki Nakayama, Kouji Mitsuhashi | 2014-06-03 |
| 8715782 | Surface processing method | Naoyuki Satoh, Keiichi Nagakubo | 2014-05-06 |
| 8545672 | Plasma processing apparatus | Eiichiro Kikuchi | 2013-10-01 |
| 8475622 | Method of reusing a consumable part for use in a plasma processing apparatus | Naoyuki Satoh, Keiichi Nagakubo, Kazuya Nagaseki | 2013-07-02 |
| 8449715 | Internal member of a plasma processing vessel | Kouji Mitsuhashi, Hiroyuki Nakayama, Tsuyoshi Moriya, Hiroshi Nagaike | 2013-05-28 |
| 8349450 | Thermal spray powder, method for forming thermal spray coating, and plasma resistant member | Hiroyuki Ibe, Isao Aoki, Junya Kitamura, Hiroaki Mizuno, Yoshiyuki Kobayashi | 2013-01-08 |
| 8318034 | Surface processing method | Naoyuki Satoh, Keiichi Nagakubo | 2012-11-27 |