Issued Patents All Time
Showing 26–36 of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8221579 | Method of reusing a consumable part for use in a plasma processing apparatus | Naoyuki Satoh, Keiichi Nagakubo, Kazuya Nagaseki | 2012-07-17 |
| 7892361 | In-chamber member, a cleaning method therefor and a plasma processing apparatus | Kouji Mitsuhashi, Hiroyuki Nakayama | 2011-02-22 |
| 7780786 | Internal member of a plasma processing vessel | Kouji Mitsuhashi, Hiroyuki Nakayama, Tsuyoshi Moriya, Hiroshi Nagaike | 2010-08-24 |
| 7646581 | Electrostatic chuck | Yasuharu Sasaki, Takehiro Ueda, Yusuke Nakagawa, Taketoshi Okajo, Mamoru Kosakai | 2010-01-12 |
| 7481903 | Processing device and method of maintaining the device, mechanism and method for assembling processing device parts, and lock mechanism and method for locking the lock mechanism | Shigeru Senzaki, Toshiki Sasaki, Tadashi Aoto, Kouji Mitsuhashi | 2009-01-27 |
| 7364798 | Internal member for plasma-treating vessel and method of producing the same | Yoshio Harada, Junichi Takeuchi, Kouji Mitsuhashi | 2008-04-29 |
| 6899786 | Processing device and method of maintaining the device, mechanism and method for assembling processing device part, and lock mechanism and method for locking the lock mechanism | Shigeru Senzaki, Toshiki Sasaki, Tadashi Aoto, Kouji Mitsuhashi | 2005-05-31 |
| 6884516 | Internal member for plasma-treating vessel and method of producing the same | Yoshio Harada, Junichi Takeuchi, Tatsuya Hamaguchi, Kouji Mitsuhashi | 2005-04-26 |
| 6805135 | Cleaning fluid and cleaning method for component of semiconductor-treating apparatus | Kenichi Hirota, Hitoshi Yamada, Kiyoshi Yuasa, Eiji Yamaguchi, Shinichi Kawaguchi +1 more | 2004-10-19 |
| 6790289 | Method of cleaning a plasma processing apparatus | Taira Takase, Kouji Mitsuhashi, Hiroyuki Nakayama | 2004-09-14 |
| 6783863 | Plasma processing container internal member and production method thereof | Yoshio Harada, Junichi Takeuchi, Tatsuya Hamaguchi, Kouji Mitsuhashi | 2004-08-31 |