Issued Patents All Time
Showing 1–25 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11887877 | Electrostatic chuck device | Masaki Ozaki, Keisuke Maeda | 2024-01-30 |
| 11664261 | Electrostatic chuck device | Masaki Ozaki, Keisuke Maeda | 2023-05-30 |
| 11551962 | Ceramic substrate and susceptor | Nobuhiro Hidaka, Naoto Kimura, Hironori Kugimoto | 2023-01-10 |
| 11107719 | Electrostatic chuck device and method for manufacturing electrostatic chuck device | Nobuhiro Hidaka, Hironori Kugimoto | 2021-08-31 |
| 10923381 | Electrostatic chuck device | Yukio Miura, Kazunori Ishimura, Keisuke Maeda, Hitoshi Kouno, Yuuki Kinpara +2 more | 2021-02-16 |
| 10622239 | Electrostatic chuck device | Shinichi Maeta, Keisuke Maeda | 2020-04-14 |
| 10502639 | Plate-shaped body for temperature measurement and temperature measuring apparatus provided with the same | Kazunori Ishimura, Takeshi Watanabe, Hitoshi Kouno, Ryuuji Hayahara | 2019-12-10 |
| 10475687 | Electrostatic chuck device | Yukio Miura | 2019-11-12 |
| 10475688 | Electrostatic chuck device, and semiconductor manufacturing device | Kazunori Ishimura, Kazuto Ando, Kentaro Takahashi, Yuhki Kinpara, Shinichi Maeta | 2019-11-12 |
| 10256131 | Electrostatic chuck device | Shinichi Maeta, Keisuke Maeda | 2019-04-09 |
| 10153192 | Electrostatic chuck device | Shinichi Maeta, Yukio Miura, Hitoshi Kouno | 2018-12-11 |
| 10079167 | Electrostatic chucking device | — | 2018-09-18 |
| 9721822 | Electrostatic chuck apparatus | Yasuharu Sasaki, Kenji Masuzawa, Toshiyuki MAKABE, Takashi Satou, Kazunori Ishimura +2 more | 2017-08-01 |
| 9466518 | Electrostatic chuck device | Shinichi Maeta, Yukio Miura, Takeshi Otsuka | 2016-10-11 |
| 9412635 | Electrostatic chuck device | Yasuharu Sasaki, Kaoru Oohashi, Tomoyuki Takahashi, Tadashi Aoto, Shinichi Maeta +3 more | 2016-08-09 |
| 9343346 | Electrostatic chuck apparatus | Kazunori Ishimura, Takashi Satou, Ryuuji Hayahara, Takeshi Watanabe, Yoshiaki Moriya +1 more | 2016-05-17 |
| 9269600 | Electrostatic chuck device | Yukio Miura, Kazunori Ishimura | 2016-02-23 |
| 9209061 | Electrostatic chuck device | Ryuuji Hayahara, Kazunori Ishimura | 2015-12-08 |
| 8981263 | Electrostatic chuck apparatus | Yasuharu Sasaki, Kenji Masuzawa, Toshiyuki MAKABE, Takashi Satou, Kazunori Ishimura +2 more | 2015-03-17 |
| 8284538 | Electrostatic chuck device | Shinji Himori, Shoichiro Matsuyama, Atsushi Matsuura, Hiroshi Inazumachi, Yukio Miura +1 more | 2012-10-09 |
| 8264813 | Electrostatic chuck device | Hiroshi Inazumachi, Yukio Miura, Keigo Maki | 2012-09-11 |
| 7646581 | Electrostatic chuck | Yasuharu Sasaki, Takehiro Ueda, Yusuke Nakagawa, Nobuyuki Nagayama, Taketoshi Okajo | 2010-01-12 |
| 7619870 | Electrostatic chuck | Shinji Himori, Shoichiro Matsuyama, Atsushi Matsuura, Hiroshi Inazumachi, Yukio Miura +1 more | 2009-11-17 |
| D587222 | Attracting plate of an electrostatic chuck for semiconductor manufacturing | Yasuharu Sasaki | 2009-02-24 |
| 6991703 | Bonding method, bonding stage and electronic component packaging apparatus | Takeshi Ootsuka | 2006-01-31 |