Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11569073 | Assembly provided with coolant flow channel, method of controlling assembly provided with coolant flow channel, and substrate processing apparatus | Jun Hirose | 2023-01-31 |
| 10629464 | Plasma processing apparatus and heater temperature control method | — | 2020-04-21 |
| 10026631 | Plasma processing apparatus and heater temperature control method | — | 2018-07-17 |
| 9728381 | Plasma processor and plasma processing method | Akihiro Kikuchi, Satoshi Kayamori, Shinya Shima, Yuichiro Sakamoto, Kimihiro Higuchi +3 more | 2017-08-08 |
| 9437402 | Plasma processor and plasma processing method | Akihiro Kikuchi, Satoshi Kayamori, Shinya Shima, Yuichiro Sakamoto, Kimihiro Higuchi +3 more | 2016-09-06 |
| 9412635 | Electrostatic chuck device | Yasuharu Sasaki, Tomoyuki Takahashi, Tadashi Aoto, Mamoru Kosakai, Shinichi Maeta +3 more | 2016-08-09 |
| 8904957 | Plasma processor and plasma processing method | Akihiro Kikuchi, Satoshi Kayamori, Shinya Shima, Yuichiro Sakamoto, Kimihiro Higuchi +3 more | 2014-12-09 |
| 8869376 | Substrate mounting table and method for manufacturing same, substrate processing apparatus, and fluid supply mechanism | Takehiro Ueda, Yoshiyuki Kobayashi | 2014-10-28 |
| 8573836 | Apparatus and method for evaluating a substrate mounting device | Yasuharu Sasaki, Takehiro Ueda, Taketoshi Okajo | 2013-11-05 |
| 8491752 | Substrate mounting table and method for manufacturing same, substrate processing apparatus, and fluid supply mechanism | Takehiro Ueda, Yoshiyuki Kobayashi | 2013-07-23 |
| 8387562 | Plasma processor and plasma processing method | Akihiro Kikuchi, Satoshi Kayamori, Shinya Shima, Yuichiro Sakamoto, Kimihiro Higuchi +3 more | 2013-03-05 |
| 8056503 | Plasma procesor and plasma processing method | Akihiro Kikuchi, Satoshi Kayamori, Shinya Shima, Yuichiro Sakamoto, Kimihiro Higuchi +3 more | 2011-11-15 |
| 7815740 | Substrate mounting table, substrate processing apparatus and substrate processing method | Toshihiro Hayami | 2010-10-19 |
| 7718007 | Substrate supporting member and substrate processing apparatus | Toshihiro Hayami | 2010-05-18 |
| D553104 | Absorption board for an electric chuck used in semiconductor manufacture | Shunsuke Mizukami, Takehiro Ueda | 2007-10-16 |
| 4618156 | Vehicle height control system | Hideaki Kato | 1986-10-21 |
| 4611815 | Vehicle height control system | Yoshihiro Sasage, Naoto Ooka | 1986-09-16 |
| 4593920 | Vehicle height control system | Kazuyuki Natsume, Yoshihiro Sasage, Naoto Ooka | 1986-06-10 |
| 4591185 | Vehicle height control system | Kazuyuki Natsume | 1986-05-27 |