Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9410753 | Substrate temperature adjusting method and a method of changing the temperature control range of a heater in a substrate processing apparatus | Toshiyuki MAKABE | 2016-08-09 |
| 8999068 | Chamber cleaning method | Masanobu Honda, Hidetoshi Hanaoka, Taichi Hirano, Takanori Mimura, Manabu Iwata | 2015-04-07 |
| 8573836 | Apparatus and method for evaluating a substrate mounting device | Yasuharu Sasaki, Takehiro Ueda, Kaoru Oohashi | 2013-11-05 |
| 7646581 | Electrostatic chuck | Yasuharu Sasaki, Takehiro Ueda, Yusuke Nakagawa, Nobuyuki Nagayama, Mamoru Kosakai | 2010-01-12 |
| 7592569 | Substrate processing apparatus, pressure control method for substrate processing apparatus and recording medium having program recorded therein | — | 2009-09-22 |
| 7582491 | Method for diagnosing electrostatic chuck, vacuum processing apparatus, and storage medium | Yasuharu Sasaki | 2009-09-01 |