Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165842 | Control method and plasma processing apparatus | Chishio Koshimizu, Toru HAYASAKA, Shinji Kubota, Koji Maruyama, Takashi Dokan | 2024-12-10 |
| 11742181 | Control method and plasma processing apparatus | Chishio Koshimizu, Toru HAYASAKA, Shinji Kubota, Koji Maruyama, Takashi Dokan | 2023-08-29 |
| 11742182 | Control method and plasma processing apparatus | Chishio Koshimizu, Toru HAYASAKA, Shinji Kubota, Koji Maruyama, Takashi Dokan | 2023-08-29 |
| 11476089 | Control method and plasma processing apparatus | Chishio Koshimizu, Toru HAYASAKA, Shinji Kubota, Koji Maruyama, Takashi Dokan | 2022-10-18 |
| 10755894 | Power supply system | Fumitoshi Kumagai | 2020-08-25 |
| 10229819 | Plasma processing apparatus and probe apparatus | Kenji Sato | 2019-03-12 |
| 10115567 | Plasma processing apparatus | Ken Yoshida, Hikoichiro Sasaki, Satoshi Yamada, Yoshinobu Hayakawa, Junji Ishibashi +1 more | 2018-10-30 |
| 10056230 | Power supply system, plasma processing apparatus and power supply control method | Junji Ishibashi, Keiki Ito, Kunihiro Sato | 2018-08-21 |
| 9922802 | Power supply system, plasma etching apparatus, and plasma etching method | Fumitoshi Kumagai | 2018-03-20 |
| 9893475 | Connector system capable of mitigating signal deterioration | Kazuaki Toba, Akira Matsuda | 2018-02-13 |
| 9833127 | Wire connection device, camera head and endoscopic device | Kei Tomatsu, Akira Matsuda | 2017-12-05 |
| 9698539 | Connector, data transmitting apparatus, data receiving apparatus, and data transmitting and receiving system | Kazuaki Toba, Akira Matsuda | 2017-07-04 |
| 9209570 | Connector, cable, transmission device, reception device, and manufacturing method of connector | Kazuaki Toba, Hideyuki Suzuki | 2015-12-08 |
| 8999068 | Chamber cleaning method | Masanobu Honda, Hidetoshi Hanaoka, Takanori Mimura, Manabu Iwata, Taketoshi Okajo | 2015-04-07 |
| 8512510 | Plasma processing method and apparatus | Akira Koshiishi, Jun Hirose, Masahiro Ogasawara, Hiromitsu Sasaki, Tetsuo Yoshida +4 more | 2013-08-20 |
| 8193097 | Plasma processing apparatus and impedance adjustment method | — | 2012-06-05 |
| 8178444 | Substrate processing method and substrate processing apparatus | Chishio Koshimizu, Masanobu Honda, Shinji Himori | 2012-05-15 |
| 7506610 | Plasma processing apparatus and method | Akira Koshiishi, Jun Hirose, Masahiro Ogasawara, Hiromitsu Sasaki, Tetsuo Yoshida +4 more | 2009-03-24 |
| 7494561 | Plasma processing apparatus and method, and electrode plate for plasma processing apparatus | Akira Koshiishi, Jun Hirose, Masahiro Ogasawara, Hiromitsu Sasaki, Tetsuo Yoshida +4 more | 2009-02-24 |
| 4879937 | Sound effector | — | 1989-11-14 |