Issued Patents All Time
Showing 1–25 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11404279 | Etching method and substrate processing apparatus | Takahiro Ohori, Taiki Miura | 2022-08-02 |
| 11389617 | Sleep induction device and sleep induction method | — | 2022-07-19 |
| 11257662 | Annular member, plasma processing apparatus and plasma etching method | Shingo Kitamura, Koichi Kazama, Susumu Nogami, Tetsuji Sato | 2022-02-22 |
| 10384073 | Skin wound healing and hair growth | — | 2019-08-20 |
| 9865471 | Etching method and etching apparatus | Gaku Shimoda, Hotaka Maruyama, Takanori Sato, Masafumi Urakawa | 2018-01-09 |
| 9716014 | Method of processing workpiece | Fumiya Kobayashi | 2017-07-25 |
| 9530657 | Method of processing substrate and substrate processing apparatus | Masafumi Urakawa, Rui Takahashi | 2016-12-27 |
| 9257301 | Method of etching silicon oxide film | Masafumi Urakawa, Yoshinobu Hayakawa, Kazuhiro Kubota, Hikaru Watanabe | 2016-02-09 |
| 8986561 | Substrate processing method and storage medium | Sungtae Lee, Masahiro Ito | 2015-03-24 |
| 8815106 | Method of supplying etching gas and etching apparatus | Yoshiyuki Kato, Hideki Mizuno, Yoshinobu Hayakawa | 2014-08-26 |
| 8642482 | Plasma etching method, control program and computer storage medium | Sungtae Lee | 2014-02-04 |
| 8609549 | Plasma etching method, plasma etching apparatus, and computer-readable storage medium | Sungtae Lee, Junichi Sasaki, Naohito Yanagida | 2013-12-17 |
| 8512510 | Plasma processing method and apparatus | Akira Koshiishi, Jun Hirose, Taichi Hirano, Hiromitsu Sasaki, Tetsuo Yoshida +4 more | 2013-08-20 |
| 8298960 | Plasma etching method, control program and computer storage medium | Sungtae Lee | 2012-10-30 |
| 7506610 | Plasma processing apparatus and method | Akira Koshiishi, Jun Hirose, Taichi Hirano, Hiromitsu Sasaki, Tetsuo Yoshida +4 more | 2009-03-24 |
| 7494561 | Plasma processing apparatus and method, and electrode plate for plasma processing apparatus | Akira Koshiishi, Jun Hirose, Taichi Hirano, Hiromitsu Sasaki, Tetsuo Yoshida +4 more | 2009-02-24 |
| 7351665 | Plasma etching method, plasma etching apparatus, control program, computer recording medium and recording medium having processing recipe recorded thereon | — | 2008-04-01 |
| 7300881 | Plasma etching method | Kazuya Kato, Katsuhiko Ono, Hideki Mizuno, Akinori Kitamura, Noriyuki Kobayashi +2 more | 2007-11-27 |
| 7255773 | Plasma processing apparatus and evacuation ring | Kazuya Kato | 2007-08-14 |
| 6878234 | Plasma processing device and exhaust ring | Kazuya Kato | 2005-04-12 |
| 5997962 | Plasma process utilizing an electrostatic chuck | Ryo Nonaka, Yoshiyuki Kobayashi | 1999-12-07 |
| 5919332 | Plasma processing apparatus | Akira Koshiishi, Keizo Hirose, Kazuya Nagaseki, Riki Tomoyoshi, Makoto Aoki | 1999-07-06 |
| 5785877 | Dry etching method | Masaaki Sato, Yoshinobu Arita, Hidenori Satoh, Hiromitsu Kanbara | 1998-07-28 |
| 5770098 | Etching process | Yoichi Araki, Koichiro Inazawa, Sachiko Furuya, Chishio Koshimizu, Tiejun Song | 1998-06-23 |
| 5717294 | Plasma process apparatus | Itsuko Sakai, Makoto Sekine, Keiji Horioka, Yukimasa Yoshida, Koichiro Inazawa +2 more | 1998-02-10 |