Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12211678 | Recipe updating method | — | 2025-01-28 |
| 11037763 | Member and plasma processing apparatus | Yuki Sugawara, Masanori ASAHARA | 2021-06-15 |
| 10707053 | Plasma processing method and plasma processing apparatus | Koichi Nagami | 2020-07-07 |
| 9870898 | Plasma processing method and plasma processing apparatus | Koichi Nagami | 2018-01-16 |
| 9865471 | Etching method and etching apparatus | Gaku Shimoda, Hotaka Maruyama, Takanori Sato, Masahiro Ogasawara | 2018-01-09 |
| 9653316 | Plasma processing method and plasma processing apparatus | — | 2017-05-16 |
| 9530657 | Method of processing substrate and substrate processing apparatus | Rui Takahashi, Masahiro Ogasawara | 2016-12-27 |
| 9257301 | Method of etching silicon oxide film | Masahiro Ogasawara, Yoshinobu Hayakawa, Kazuhiro Kubota, Hikaru Watanabe | 2016-02-09 |
| 9224616 | Etching method and plasma processing apparatus | — | 2015-12-29 |
| 8183161 | Method and system for dry etching a hafnium containing material | Luis Fernandez | 2012-05-22 |
| 8038835 | Processing device, electrode, electrode plate, and processing method | Kazuichi Hayashi, Kouichi Yatsuda | 2011-10-18 |
| 7846645 | Method and system for reducing line edge roughness during pattern etching | — | 2010-12-07 |
| 7743731 | Reduced contaminant gas injection system and method of using | Takashi Enomoto, Masaaki Hagihara, Akiteru Ko, Shinji Hamamoto, Arthur Laflamme +1 more | 2010-06-29 |