Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8310054 | Semiconductor device manufacturing method and target substrate processing system | Hidenori Miyoshi | 2012-11-13 |
| 8038835 | Processing device, electrode, electrode plate, and processing method | Kouichi Yatsuda, Masafumi Urakawa | 2011-10-18 |
| 8003535 | Semiconductor device manufacturing method and target substrate processing system | Hidenori Miyoshi | 2011-08-23 |
| 6368450 | Processing apparatus | — | 2002-04-09 |
| 6253029 | Vacuum processing apparatus | Teruo Iwata | 2001-06-26 |
| 6156107 | Trap apparatus | Yuichiro Fujikawa | 2000-12-05 |
| 6149729 | Film forming apparatus and method | Teruo Iwata, Yuichiro Fujikawa, Takashi Horiuchi | 2000-11-21 |
| 5942282 | Method for depositing a titanium film | Kunihiro Tada, Yoshihiro Tezuka | 1999-08-24 |
| 5904757 | Trap apparatus | Yuichiro Fujikawa | 1999-05-18 |
| 5879139 | Vacuum pump with gas heating | Teruo Iwata | 1999-03-09 |