Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12032298 | Measurement tool and method for lithography masks | Adam Seeger, Ping Qu | 2024-07-09 |
| 11815810 | Measurement tool and methods for EUV lithography masks | Marieke Ordway, Charles W. Holzwarth | 2023-11-14 |
| 7679731 | Detecting and characterizing mask blank defects using angular distribution of scattered light | — | 2010-03-16 |
| 7630068 | Method and system of defect inspection for mask blank and method of manufacturing semiconductor device using the same | Toshihiko Tanaka, Tsuneo Terasawa | 2009-12-08 |
| 7220969 | Mask blanks inspection tool | Masaaki Ito | 2007-05-22 |
| 7005649 | Mask blanks inspection method and mask blank inspection tool | Masaaki Ito | 2006-02-28 |
| 6979408 | Method and apparatus for photomask fabrication | Toshifumi Yokoyama, Tsukasa Abe | 2005-12-27 |
| 6250268 | Cam chain guide attachment structure | Noritoshi Iwase, Katsunori Takahashi, Toru Iizuka | 2001-06-26 |
| 6210843 | Modulation of peripheral critical dimension on photomask with differential electron beam dose | Fred Chen, Wilman Tsai, Steven Labovitz, Jeff Farnsworth | 2001-04-03 |
| 6004872 | Method of manufacturing semiconductor device | Kunihiro Tada | 1999-12-21 |
| 5942282 | Method for depositing a titanium film | Kunihiro Tada, Kazuichi Hayashi | 1999-08-24 |