| 12032298 |
Measurement tool and method for lithography masks |
Adam Seeger, Ping Qu |
2024-07-09 |
| 11815810 |
Measurement tool and methods for EUV lithography masks |
Marieke Ordway, Charles W. Holzwarth |
2023-11-14 |
| 7679731 |
Detecting and characterizing mask blank defects using angular distribution of scattered light |
— |
2010-03-16 |
| 7630068 |
Method and system of defect inspection for mask blank and method of manufacturing semiconductor device using the same |
Toshihiko Tanaka, Tsuneo Terasawa |
2009-12-08 |
| 7220969 |
Mask blanks inspection tool |
Masaaki Ito |
2007-05-22 |
| 7005649 |
Mask blanks inspection method and mask blank inspection tool |
Masaaki Ito |
2006-02-28 |
| 6979408 |
Method and apparatus for photomask fabrication |
Toshifumi Yokoyama, Tsukasa Abe |
2005-12-27 |
| 6250268 |
Cam chain guide attachment structure |
Noritoshi Iwase, Katsunori Takahashi, Toru Iizuka |
2001-06-26 |
| 6210843 |
Modulation of peripheral critical dimension on photomask with differential electron beam dose |
Fred Chen, Wilman Tsai, Steven Labovitz, Jeff Farnsworth |
2001-04-03 |
| 6004872 |
Method of manufacturing semiconductor device |
Kunihiro Tada |
1999-12-21 |
| 5942282 |
Method for depositing a titanium film |
Kunihiro Tada, Kazuichi Hayashi |
1999-08-24 |
